Chemical reaction dynamics in oxidation processes of Si(001) surface at high temperature

Teraoka, Yuden; Yoshigoe, Akitaka; Moritani, Kosuke

Shinku, 47(4), p.301 - 307, 2004/04

https://doi.org/10.3131/jvsj.47.301

Recent research results on translational kinetic energy effects of incident oxygen molecules for Si(001) oxidation are summalized and introduced. The variation of surface temperature dependence of SiO desorption yield, oxygen uptake curves, and chemical bonding states depending on translational kinetic energy of oxygen molecules is described concretely. Eapecially, the translational kinetic energy effects on chemical reaction processes of concurrent oxide-layers formation and SiO desorption are discussed.